Menu Bar Coordinated Motion and Velocity Profile Measurements Download Measurement Data

In this example, SensorPlot™ was used to monitor the angular position of a photo-resist dispense arm and the voltage on an actuator as the dispense arm moved across a rotating semiconductor wafer. The velocity of the arm was also measured to verify the accuracy of the velocity profile.

To verify that the dispense actuator was being engaged at the appropriate arm angle, the voltage driving the actuator was measured synchronously with the position and velocity measurements of the arm. Below is a summary of the application parameters.

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